全新的Precis® 200是基于Micro-Metric的Innova晶圆量测系统开发而来,采用了VMM 公司先进的设计和技术。
, 新款Precis 包含了很多可配置选项,使设备更加通用,耐用以及可靠。
- 扩展了Z轴范围 – 2.5mm, 5mm or 100mm
- 透射照明
- 完整电子绘图 – 完全符合 SEMI S2 和 CE 标准
- 符合人体工程学的操作员控制台 ,带有隐藏键盘托盘, 可调节高度和角度的控制面板和显示器, SEMI S8 符合
- 全自动显微镜,所有设置计算机控制
- 佳分辨率像素摄像头
- VIEW Metrology Software (VMS™) 可测组件很广泛, 可选CAD导入 以及完整的几何尺寸和公差导入。
- MMWin – 晶圆片 和Mask计量软件 –晶圆片的重要尺寸和迭置重合测量, 滑块 ABS,光掩模和平板显示器.
- 标准 可选
- X,Y,Z行程(mm): 200 x 200 x 5 200 x 200 x 100
- 大载重: 12 kg
- XY精度: E1=(0.25+2L/1000)um
- Z 精度: E1=(0.25)um (with use of a 100X lens)
- 分辨率: 0.01 微米
- 视场测量精度和重复性:0.01 μm (100x)
- 直流伺服马达驱动
The all-new Precis® 200 incorporates the most advanced design and technology from VIEW-MM. based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable options that make the system more versatile, serviceable and reliable:
- Extended Z-axis range – 2.5mm, 5mm or 100mm
- Transmitted illumination
- Integral electronics drawer – fully compliant with SEMI S2 and CE standards
- Ergonomic operator control station with hide-away keyboard tray, adjustable height and angle for control panel and display monitor, SEMI S8 compliant
- Fully automated microscope with all settings computer controlled
- Megapixel camera for optimum resolution
- VIEW Metrology Software (VMS™) allows a wide range of components to be measured, with the option of CAD translation and full geometric dimensioning and tolerancing.
- MMWin – wafer and mask metrology software – ideal for critical dimension and overlay registration measurement for wafers, slider ABS, photomask and flat panel displays.
- Standard Optional
- X,Y,Z travel (mm): 200 x 200 x 5 200 x 200 x 100
- Max Recommanded load: 12 kg
- XY Linear Accuracy: E1=(0.25+2L/1000)um
- Z Linear Accuracy: E1=(0.25)um (with use of a 100X lens)
- Resolution: 0.01 μm
- Field of measurement accuracy and repeatability :0.01 μm (100x)
- Dc servo motor drive
- 亚微米测量:
◆ 微器件和电子元器件封装、引线框
◆ 微型球状引脚栅格阵列封装
◆ 硬盘驱动臂、探针卡、刀片
- CD 和套刻测量:
◆ 线宽、涂覆层
◆ MEMS 器件、接触窗、喷墨打印头
◆ 硬盘驱动头、磁头等